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Absolute Calibration of Sims Depth Profiles of a-SiNx:H/a-Si:H and a-SiOx:H/a-Si:H Multilayers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 382 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 203
- Print publication:
- 1995
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- Article
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