1 results
Deposition and Characterization of Ultrathin Ta2O5 Layers Deposited on Silicon From a Ta(OC2H5)5 Precursor
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 592 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 75
- Print publication:
- 1999
-
- Article
- Export citation