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Simulation Studies of TiN PVD and CVD Thin Films for Contact/Via Liners
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- Journal:
- MRS Online Proceedings Library Archive / Volume 389 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 173
- Print publication:
- 1995
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In-Situ Spectroscopic Ellipsometry Applied to ZnSe and ZnCdSe Growth Process in Organometallic Vapor Phase Epitaxy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 242 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 237
- Print publication:
- 1992
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- Article
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