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The Effects of Modulation on an RF Discharge in Silane and on the Deposited a-Si:H
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- Journal:
- MRS Online Proceedings Library Archive / Volume 98 / 1987
- Published online by Cambridge University Press:
- 25 February 2011, 321
- Print publication:
- 1987
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- Article
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Discharge Annealing of Ion Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 4 / 1981
- Published online by Cambridge University Press:
- 15 February 2011, 795
- Print publication:
- 1981
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- Article
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