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Mechanical Properties of Alumina Films Sputtered Over Steps
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- Journal:
- MRS Online Proceedings Library Archive / Volume 356 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 201
- Print publication:
- 1994
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- Article
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Stress, Mechanical Properties and Composition Measurements in Sputtered Thick Alumina Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 308 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 595
- Print publication:
- 1993
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- Article
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