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Processing-Induced Stresses and Curvature in Patterned Lines on Silicon Wafers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 436 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 435
- Print publication:
- 1996
-
- Article
- Export citation
Processing-Induced Stresses And Curvature In Patterned Lines On Silicon Wafers
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 428 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 505
- Print publication:
- 1996
-
- Article
- Export citation