4 results
In-situ Growth and Growth Kinetics of Epitaxial (100) CoSi2 Layer on (100) Si by Reactive Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 611 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, C10.3.1
- Print publication:
- 2000
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Silicon Field Emission Arrays Coated with CoSi2 Layer Grown by Reactive Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 621 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, R5.1.1
- Print publication:
- 2000
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Epitaxial Growth and Thermal Stability of CoSi2 Layer on (100) Si from Co-C Films without Capping Layer
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- Journal:
- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 145
- Print publication:
- 1999
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Pre-Treatment Effect on Aluminum Thin Films Deposition from Cvd Using Dimethylethylamine Alane
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- Journal:
- MRS Online Proceedings Library Archive / Volume 514 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 351
- Print publication:
- 1998
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