Carbon nitride (C-N) thin films were prepared on several substrates by
ion-beam-assisted deposition technique. In this experiment, carbon was
evaporated by electron beam. Nitrogen and argon ion beams were bombarded
simultaneously. Aluminum alloy (7075), high-carbon chrome bearing steel
(SUJ2), pure titanium plates (99.5%) and Si(100) wafer were used as
substrates. Here, mechanical properties, such as hardness, adhesion,
friction coefficient and wear resistance were investigated. These results
show the adhesion between the films and substrates were improved by
formation of the carbon layer. The microstructure of the carbon nitride
films were investigated by cross sectional high-resolution transmission
electron microscopy (HRTEM).