3 results
The Influence of Defects on Compatibility and Yield of the HfO2-PolySilicon Gate Stack for CMOS Integration
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 747 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, T6.7/N8.7
- Print publication:
- 2002
-
- Article
- Export citation
The Influence of Defects on Compatibility and Yield of the HfO2-PolySilicon Gate Stack for CMOS Integration
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 745 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, N8.7/T6.7
- Print publication:
- 2002
-
- Article
- Export citation
Surface Structure of A Liquid Perfluoropolyether Examined by Reactive Ion/Surface Scattering
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 380 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 93
- Print publication:
- 1995
-
- Article
- Export citation