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FIB Prepared TEM Sample Lift-out Using MEMS Grippers
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- Journal:
- Microscopy and Microanalysis / Volume 10 / Issue S02 / August 2004
- Published online by Cambridge University Press:
- 01 August 2004, pp. 1144-1145
- Print publication:
- August 2004
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- Article
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Friction and Wear Properties of ALD Coated MEMS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 841 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, R9.16
- Print publication:
- 2004
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- Article
- Export citation