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Pre-Patterned CVD Graphene: Insights on ALD deposition parameters and their influence on Al2O3 and graphene layers
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- Journal:
- MRS Advances / Volume 1 / Issue 20 / 2016
- Published online by Cambridge University Press:
- 18 March 2016, pp. 1401-1409
- Print publication:
- 2016
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- Article
- Export citation