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Rutherford Backscattering (RBS) and Channeling Studies of Defects in Arsenic Implanted Silicon Induced by Arsenic Clustering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 82 / 1986
- Published online by Cambridge University Press:
- 26 February 2011, 115
- Print publication:
- 1986
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- Article
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