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Site-Specific Cross-sectioning of IC Devices for Failure Analysis by SEM/TEM: Specimen Preparation Challenge and Approach
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- Journal:
- Microscopy Today / Volume 2 / Issue 4 / July 1994
- Published online by Cambridge University Press:
- 14 March 2018, pp. 9-10
- Print publication:
- July 1994
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- Article
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