3 results
Kinetic analysis and correlation with residual stress of the Ni/Si system in thin film
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- Journal:
- MRS Online Proceedings Library Archive / Volume 875 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, O14.5
- Print publication:
- 2005
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Thermal stress relaxation of plasma enhanced chemical vapour deposition silicon nitride
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- Journal:
- MRS Online Proceedings Library Archive / Volume 875 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, O14.6
- Print publication:
- 2005
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Solid Phase Epitaxy process integration on 50-nm PMOS devices: Effects of defects on chemical and electrical characteristics of ultra shallow junctions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C1.4
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- 2004
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