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Buried Silicon-Nitride by High Temperature Nitrogen Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 479
- Print publication:
- 1987
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- Article
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Defect Structure at Buried Silicon Nitride Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 45 / 1985
- Published online by Cambridge University Press:
- 25 February 2011, 329
- Print publication:
- 1985
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- Article
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