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Surface Roughness of Silicon-Nitride Gate Insulators Deposited in a 40-MHZ Glow Discharge
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 420 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 99
- Print publication:
- 1996
-
- Article
- Export citation
Surface Roughness of Silicon-Nitride Gate Insulators Deposited in a 40-MHZ Glow Discharge
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 424 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 19
- Print publication:
- 1996
-
- Article
- Export citation