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Characterizing the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1299 / 2011
- Published online by Cambridge University Press:
- 01 March 2011, mrsf10-1299-s03-04
- Print publication:
- 2011
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- Article
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