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Residual Stress in Silicon Nitride Thin Films Deposited by ECR-PECVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 795 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, U11.4
- Print publication:
- 2003
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- Article
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Spm Based Lithography for Nanometer Scale Electrodes Fabrication
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- Journal:
- MRS Online Proceedings Library Archive / Volume 584 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 319
- Print publication:
- 1999
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- Article
- Export citation