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Activated Pulsed Metalorganic Chemical Vapor Deposition of Ge2Sb2Te5 Thin Films Using Alkyl Precursors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1251 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1251-H03-23
- Print publication:
- 2010
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- Article
- Export citation