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Ion Yield, Sputter Rate, and Sims Matrix Effects in Quantitative Analysis of (AlxGa1−x)0.5N0.5
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- Journal:
- MRS Online Proceedings Library Archive / Volume 510 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 155
- Print publication:
- January 1998
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- Article
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