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Morphology of Tantalum Nitride Thin Films Grown on Fused Quartz by Reactive High Power Impulse Magnetron Sputtering (HiPIMS)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1803 / 2015
- Published online by Cambridge University Press:
- 25 May 2015, mrss15-2136859
- Print publication:
- 2015
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- Article
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