2 results
Low-Temperature, High-Quality Silicon Dioxide Thin Films Deposited Using Tetramethylsilane (TMS)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 508 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 121
- Print publication:
- January 1998
-
- Article
- Export citation
A Comprehensive Study of Plasma Enhanced Crystallization of a-Si:H Films on Glass
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 345 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 81
- Print publication:
- 1994
-
- Article
- Export citation