3 results
Directional Deposition of Silicon Oxide by a Plasma Enhanced TEOS Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 165 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 107
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- 1989
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Kinetics and Mechanism of the Copper-Catalyzed Etching of Silicon by F2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 111 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 397
- Print publication:
- 1987
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Catalyzed Gaseous Etching of Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 75 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 459
- Print publication:
- 1986
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