4 results
Room-Temperature Migration of Ion-Implanted Boron in Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 469 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 53
- Print publication:
- 1997
-
- Article
- Export citation
Low Energy Implantation and Transient Enhanced Diffusion: Physical Mechanisms and Technology Implications
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 469 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 265
- Print publication:
- 1997
-
- Article
- Export citation
Low Energy Ion Implantation of as During Si-MBE
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 378 / 1995
- Published online by Cambridge University Press:
- 26 February 2011, 115
- Print publication:
- 1995
-
- Article
- Export citation
Integration of Si-MBE and Device Processing
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 220 / 1991
- Published online by Cambridge University Press:
- 22 February 2011, 3
- Print publication:
- 1991
-
- Article
- Export citation