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Low Temperature Silicon Epitaxial Growth by Plasma Enhanced Chemical Vapor Deposition from SiH4/He/H2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 236 / 1991
- Published online by Cambridge University Press:
- 25 February 2011, 349
- Print publication:
- 1991
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- Article
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Low Temperature Silicon Epitaxial Growth by Plasma Enhanced Chemical Vapor Deposition From SiH4/He/H2
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 807
- Print publication:
- 1991
-
- Article
- Export citation