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Characterization of the Piezoelectric Response of Aluminum Nitride Grown by dc Magnetron Sputtering for Applications in Thin-Film Resonators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 444 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 215
- Print publication:
- 1996
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- Article
- Export citation