2 results
Fin Sidewall Microroughness Measurement by AFM
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- Journal:
- MRS Online Proceedings Library Archive / Volume 811 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, E1.13
- Print publication:
- 2004
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Interfacial Roughness of HfxSi1-xO2 High-k films by TEM and AFM
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- Journal:
- Microscopy and Microanalysis / Volume 9 / Issue S02 / August 2003
- Published online by Cambridge University Press:
- 22 July 2003, pp. 458-459
- Print publication:
- August 2003
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- Article
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