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The Dependence of Defect Density in GexSi1−x/Si Heterostructures Grown by Remote Plasma-Enhanced Chemical Vapor Deposition on Deposition Parameters
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- Journal:
- MRS Online Proceedings Library Archive / Volume 263 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 445
- Print publication:
- 1992
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- Article
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