1 results
Phosphorous and Boron Incorporation and its Effect on Optical Properties of Ge:H and Si0.01Ge0.99:HFilms Deposited by LF PECVD
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1372 / 2012
- Published online by Cambridge University Press:
- 31 January 2012, imrc-1372-s3-p43
- Print publication:
- 2012
-
- Article
- Export citation