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EFTEM Contrast Tuning and EELS Fine Structure Analysis for Characterization of Carbon Containing Ultra-Low-k Dielectric Materials
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- Journal:
- Microscopy and Microanalysis / Volume 21 / Issue S3 / August 2015
- Published online by Cambridge University Press:
- 23 September 2015, pp. 831-832
- Print publication:
- August 2015
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- Article
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Energy-dispersive x-ray spectrum simulation and emprical observation of 22nm node high-k metal gate structure
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- Journal:
- Microscopy and Microanalysis / Volume 21 / Issue S3 / August 2015
- Published online by Cambridge University Press:
- 23 September 2015, pp. 1785-1786
- Print publication:
- August 2015
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- Article
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- You have access
- Export citation