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Contributors
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- Book:
- Clinical Gynecology
- Published online:
- 05 April 2015
- Print publication:
- 23 April 2015, pp viii-xiv
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In Situ Spectroscopic Ellipsometry for the Real Time Process Control of Plasma Etching of Silicon Nitride
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- Journal:
- MRS Online Proceedings Library Archive / Volume 591 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 263
- Print publication:
- 1999
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- Article
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