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Process Optimization for Multiple-Pulses Laser Annealing for Boron Implanted Silicon with Germanium Pre-amorphization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 765 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, D6.19
- Print publication:
- 2003
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- Article
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Effects of Poly-Si Annealing on Gate Oxide Charging Damage in Poly-Si Gate Etching Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B4.16
- Print publication:
- 2002
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- Article
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