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Control of Crystal Orientations and Its Electrical Properties of PZT/Ru and PZT/RuO2 Thin Films by MOCVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 768 / 2003
- Published online by Cambridge University Press:
- 02 August 2011, G3.8
- Print publication:
- 2003
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- Article
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