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Low-Temperature Epitaxial Growth of IN-Situ HeavilY B-Doped Si1-xGex, Films Using Ultraclean LPCVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 533 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 349
- Print publication:
- 1998
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- Article
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