Book contents
- Frontmatter
- Contents
- List of contributors
- Preface
- 1 Introduction to the focused ion beam system
- 2 Interaction of ions with matter
- 3 Gas assisted ion beam etching and deposition
- 4 Imaging using electrons and ion beams
- 5 Characterization methods using FIB/SEM DualBeam instrumentation
- 6 High-density FIB-SEM 3D nanotomography: with applications of real-time imaging during FIB milling
- 7 Fabrication of nanoscale structures using ion beams
- 8 Preparation for physico-chemical analysis
- 9 In-situ sample manipulation and imaging
- 10 Micro-machining and mask repair
- 11 Three-dimensional visualization of nanostructured materials using focused ion beam tomography
- 12 Ion beam implantation of surface layers
- 13 Applications for biological materials
- 14 Focused ion beam systems as a multifunctional tool for nanotechnology
- Index
Preface
Published online by Cambridge University Press: 12 January 2010
- Frontmatter
- Contents
- List of contributors
- Preface
- 1 Introduction to the focused ion beam system
- 2 Interaction of ions with matter
- 3 Gas assisted ion beam etching and deposition
- 4 Imaging using electrons and ion beams
- 5 Characterization methods using FIB/SEM DualBeam instrumentation
- 6 High-density FIB-SEM 3D nanotomography: with applications of real-time imaging during FIB milling
- 7 Fabrication of nanoscale structures using ion beams
- 8 Preparation for physico-chemical analysis
- 9 In-situ sample manipulation and imaging
- 10 Micro-machining and mask repair
- 11 Three-dimensional visualization of nanostructured materials using focused ion beam tomography
- 12 Ion beam implantation of surface layers
- 13 Applications for biological materials
- 14 Focused ion beam systems as a multifunctional tool for nanotechnology
- Index
Summary
In the past few years, scientists have begun to gain the exquisite of controlling the arrangement of matter on the nanometer scale (1 nm = 10−9 m), a new field called nanotechnology, consequently, has started to emerge. As the foundation of nanotechnology, nanostructured materials take on an enormously richer variety of properties and promise exciting new advances in micromechanical, electronic, and magnetic devices as well as in molecular fabrications. The structure–composition–processing–property relationships for these sub-100 nm-sized materials can only be understood by employing the new generation microscopes such as the focused ion beam system in corporate with simultaneous operation of electron beam and in-situ analysis. This book will highlight the principles and vast capabilities of this technique and their applications in this fast-growing nanotechnology field and the challenges in the twenty-first century.
- Type
- Chapter
- Information
- Focused Ion Beam SystemsBasics and Applications, pp. xi - xiiPublisher: Cambridge University PressPrint publication year: 2007