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X-ray photoelectron spectroscopy studies of indium-tin-oxide treated via oxygen plasma immersion ion implantation

Published online by Cambridge University Press:  11 June 2013

Long He ,
Zhonghang Wu ,
Zebin Li ,
Qiongrong Ou  and
Rongqing Liang
Long He
Affiliation:
Department of Light Sources and Illuminating Engineering, Fudan University, Shanghai 200433, P.R. China
Zhonghang Wu
Affiliation:
Department of Light Sources and Illuminating Engineering, Fudan University, Shanghai 200433, P.R. China
Zebin Li
Affiliation:
Department of Light Sources and Illuminating Engineering, Fudan University, Shanghai 200433, P.R. China
Qiongrong Ou*
Affiliation:
Department of Light Sources and Illuminating Engineering, Fudan University, Shanghai 200433, P.R. China Engineering Research Center of Advanced Lighting Technology, Ministry of Education, Shanghai 200433, P.R. China
Rongqing Liang
Affiliation:
Department of Light Sources and Illuminating Engineering, Fudan University, Shanghai 200433, P.R. China Engineering Research Center of Advanced Lighting Technology, Ministry of Education, Shanghai 200433, P.R. China
*
ae-mail: qrou@fudan.edu.cn
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Abstract

Surface modification was performed on the indium-tin-oxide (ITO) thin films by oxygen inductive coupling plasma (O-ICP) and oxygen plasma immersion ion implantation (O-PIII). The electronic states of ITO surfaces were characterized by X-ray photoelectron spectroscopy (XPS). The observed peak shifts of O 1s, In 3d5/2 and Sn d5/2 core levels showed that the work function of ITO can be further enhanced by O-PIII treatment, compared with that of untreated and O-ICP treated surfaces. The deconvolution of O 1s spectrum and calculation of stoichiometry showed that the work function improvement should be attributed to the increase of effective oxygen content, namely, the elimination of oxygen vacancies. In addition, the measurement of Kelvin probe confirmed that an increment of the ITO work function by 1.1 eV was obtained on O-PIII treated sample and the results sustained our proposal.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 62 , Issue 3 , June 2013 , 30301
Copyright
© EDP Sciences, 2013

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