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A hemispherical retarding field energy analyzer to characterize spatially and angularly extended electron beams

Published online by Cambridge University Press:  05 November 2012

Fabrice Cipriani ,
Frédéric Leblanc ,
Jean-Marie Illiano  and
Jean-Jacques Berthelier
Fabrice Cipriani*
Affiliation:
ESA/ESTEC, Keplerlaan 1, 2209 AG Noordwijk, The Netherlands
Frédéric Leblanc
Affiliation:
LATMOS/IPSL, 4 avenue de Neptune, 94107 Saint-Maur-des-Fossés, France
Jean-Marie Illiano
Affiliation:
LATMOS/IPSL, 4 avenue de Neptune, 94107 Saint-Maur-des-Fossés, France
Jean-Jacques Berthelier
Affiliation:
LATMOS/IPSL, 4 avenue de Neptune, 94107 Saint-Maur-des-Fossés, France
*
ae-mail: fabrice.cipriani@esa.int
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Abstract

We have designed and built a hemispherical retarding field energy analyzer in order to facilitate characterization of large area electron emitters (typically field emitter arrays with active areas up to 1 cm2) with large angular aperture. A complete numerical model of the analyzer has been built, including perturbations due to secondary particles, in order to determine the analyzer performances. The analyzer energy resolution is better than 100 meV for an energy range up to 120 eV. The analyzer has a global field of view of 112° and allows measurements of the energy distribution of the beam as a function of the emission angle, as well as measurements of the beam intensity profile along any section of the beam. We have successfully used the analyzer to characterize the electron beam emitted by 1 cm2 Mo microtips-based field emitter arrays.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 60 , Issue 2: Topical issue: New trends in porous media. Edited by D. Salin , November 2012 , 21002
Copyright
© EDP Sciences, 2012

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References

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Cipriani, F., Ph.D. thesis, Université de Versailles Saint-Quentin-en-Yvelines, 2006
Cipriani, F., Leblanc, F., Illiano, J., Berthelier, J., Muller, F., J. Phys. D: Appl. Phys. 43, 065501 (2010)CrossRef