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Effects of focus lens position on pulsed laser deposition of ZnO films
Published online by Cambridge University Press: 25 May 2006
Abstract
ZnO thin films have been deposited on Si(111) substrates at different
positions of the focusing lens by pulsed laser deposition (PLD) of a ZnO
target in an oxygen atmosphere. The strong influence of the position of the
focusing lens on the deposition rate, crystallinity, surface morphology and
optical properties of the deposited ZnO thin films are studied. The results
show that the ZnO thin films deposited at lens-target distance $(D_{l-t}) =59.5$ cm (the focal length is 70 cm) have the highest deposition rate and
crystalline quality. The photoluminescence (PL) spectrum with the strongest
ultraviolet (UV) peak and blue peak is observed in this condition. Moreover,
the results of scanning electron microscopy (SEM) and selected area electron
diffraction (SEAD) indicate that the films deposited at this lens position
show the transition from monocrystalline to polycrystalline. Perfect
monocrystalline ZnO films are obtained only when Dl-t is changed in the
range from 63 cm to the focus position.
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- © EDP Sciences, 2006
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