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X-ray Absorption Study of Pulsed Laser Deposited Boron Nitride Films

Published online by Cambridge University Press:  22 February 2011

A. Chaiken ,
L.J. Terminello ,
J. Wong ,
G.L. Doll  and
T. Sato
A. Chaiken
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
L.J. Terminello
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
J. Wong
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
G.L. Doll
Affiliation:
GM Research and Development Laboratory, Warren, MI 48090
T. Sato
Affiliation:
NIRIM, Tsukuba City, Japan
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Abstract

B and N K-edge x-ray absorption spectroscopy measurements have been performed on three BN thin films grown on Si substrates using ion-assisted pulsed laser deposition. Comparison of the films’ spectra to those of several single-phase BN powder standards shows that the films consist primarily of sp2 bonds. Other features in the films’ spectra suggest the presence of secondary phases, possibly cubic or rhombohedral BN. Films grown at higher deposition rates and higher ion-beam voltages are found to be more disordered, in agreement with previous work.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 327: Symposium N – Covalent Ceramics II: Non-Oxides , 1993 , 363
Copyright
Copyright © Materials Research Society 1994

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