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Two Dimensional Amorphous Silicon Image Sensor Arrays

Published online by Cambridge University Press:  15 February 2011

R. A. Street ,
X. D. Wu ,
R. Weisfield ,
S. Ready ,
R. Apte ,
M. Nguyen  and
P. Nylen
R. A. Street
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
X. D. Wu
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
R. Weisfield
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
S. Ready
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
R. Apte
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
M. Nguyen
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
P. Nylen
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
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Abstract

Large two dimensional amorphous silicon image sensor arrays offer a new approach to electronic document input and x-ray imaging. The sensor array technology is now capable of image capture at greater than 10 frames/sec and with resolution of 200–400 spi. We describe our new high resolution imaging system, comprising a page-sized sensor array with nearly 3 million pixels, and the accompanying high speed read out and processing electronics. The key technological issues of pixel resolution, sensor fill factor, leakage currents and noise are reviewed. Measurements of a new array architecture are described, in which the sensor is formed as a single continuous film on top of the matrix addressing components.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 377: Symposium A – Amorphous Silicon Technology 1995 , 1995 , 757
Copyright
Copyright © Materials Research Society 1995

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References

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