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Tribological Properties of Tetrahedral Carbon Films Deposited by Filtered Cathodic Vacuum Arc Technique

Published online by Cambridge University Press:  15 February 2011

X. Shi ,
B. K. Tay ,
D. I. Flynn  and
Z. Sun
X. Shi
Affiliation:
School of Electrical and Electronic Engineering Nanyang Technological University Singapore 639798
B. K. Tay
Affiliation:
School of Electrical and Electronic Engineering Nanyang Technological University Singapore 639798
D. I. Flynn
Affiliation:
School of Electrical and Electronic Engineering Nanyang Technological University Singapore 639798
Z. Sun
Affiliation:
School of Electrical and Electronic Engineering Nanyang Technological University Singapore 639798
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Abstract

Ta-C films have been deposited using FCVA technique. The hardness and Young's modulus of the films on both silicon and sapphire substrates are determined by an ultra low load depth sensing nanoindenter to examine their dependence on the carbon ion energy. An optimum ion energy around 80 to 90 eV has been found, which coincides with the energy at which the sp3 content and film density reach maximum values. At this ion energy, the hardness, modulus and critical load of a 60 nm film on sapphire exhibit maximum values of 60 GPa, 580 GPa and 7 mN, respectively, whilst the frictional coefficient shows a minimum of 0.16.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 293
Copyright
Copyright © Materials Research Society 1997

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