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Tribological Properties of Superhard PVD Coatings

Published online by Cambridge University Press:  22 February 2011

O. Knotek  and
F. Löffler
O. Knotek
Affiliation:
University of Technology, IWKB, Templergraben 55, W-5100 Aachen, Germany
F. Löffler
Affiliation:
University of Technology, IWKB, Templergraben 55, W-5100 Aachen, Germany
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Abstract

In order to advance the development of extremely hard coatings, new homogeneous and metastable films were prepared by magnetron sputter ion plating (MSIP) and arc ion plating (AIP) in the DC. or RF. mode.

In the present study coatings in the systems Ti-B-C-N, Si-C-N and amorphous carbon coatings (ADLC) were investigated and compared with other hard coatings. Multicomponent layers of different compositions and structures were deposited by varying the reactive gases methane (CH4) and nitrogen (N2) and the dominant process parameters (e. g. C/V-characteristic of the cathode, substrate bias).

X-ray diffraction studies of the Ti-B-C-N coatings revealed either an amorphous structure or crystallization in a hexagonal lattice. The ADLC and Si-C-N coatings were always amorphous. Electron microprobe analysis and auger electron spectroscopy were used to determine the coating compositions.

The tribological properties were determined by a ball on disc tribometer (e.g. friction coefficent), a pin on disc tribometer and a special abrasive wear test.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 263
Copyright
Copyright © Materials Research Society 1992

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References

Literature

/1/ Knotek, O.; Jungblut, F.; Prengel, H.-G.; F., Löffler: Entwicklung von Hartstoffschichten auf Titanbasis für Werkzeuge. 2. Int. Konf. über Werkzeuge, Bochum, 1989 Google Scholar
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