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Titania/Silica Sol-Gel Films: Comparison of Techniques for Thin Film Thickness Measurement
Published online by Cambridge University Press: 28 February 2011
Abstract
Two techniques for thin film measurement were compared: an optical method combining ellipsometry and reflectance spectroscopy, and cross-sectional transmission electron microscopy. These techniques were used to measure the absolute thicknesses of titania/silica sol-gel films in the size range 0.1 to 0.8 microns. The relative advantages and disadvantages of these methods will be described in this study.
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- Copyright © Materials Research Society 1990
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