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Three-Dimensional Laser Chemical Vapor Deposition of Nickel-Iron Alloys

Published online by Cambridge University Press:  15 February 2011

J.L. Maxwell ,
J. Pegna ,
D.A. Deangelis  and
D.V. Messia
J.L. Maxwell
Affiliation:
Center for Integrated Electronics & Electronics Manufacturing, CII 9013, Rensselaer Polytechnic Institute, Troy, New York 12188
J. Pegna
Affiliation:
Center for Integrated Electronics & Electronics Manufacturing, CII 9013, Rensselaer Polytechnic Institute, Troy, New York 12188
D.A. Deangelis
Affiliation:
Center for Integrated Electronics & Electronics Manufacturing, CII 9013, Rensselaer Polytechnic Institute, Troy, New York 12188
D.V. Messia
Affiliation:
Center for Integrated Electronics & Electronics Manufacturing, CII 9013, Rensselaer Polytechnic Institute, Troy, New York 12188
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Abstract

A systematic study of the composition of Ni-Fe steel microstructures grown from iron pentacarbonyl and nickel tetracarbonyl by direct laser-induced pyrolysis is presented. The partial pressures of both precursors were varied from 2 to 40 mbar, resulting in needles of iron, nickel, and iron-nickel alloys. An Ar+ laser was employed at incident powers of 100 to 600 mW. Auger Spectroscopy and a microprobe were used to determine the composition of the needles vs. partial pressure and laser power. Composition was also measured along the length of the rods to determine temperature changes during needle growth. This latter effect is useful in modelling the heat flow mechanisms during 3-dimensional laser CVD, as the threshold decomposition temperatures of Fe(CO)5 and Ni(CO)4 differ and the composition of the rods affects their thermal conductivity. In some iron samples, periodic banded structures were observed along the length of the rods, indicative of periodic melting. Axial deposition rates were also measured relative to laser power density, and rates up to 40 μm/s were achieved. Photolysis in the gas phase was observed for the iron-nickel carbonyl mixture, and was largely eliminated with a high-pass UV filter at 420nm. Additional disassociation of the carbonyl groups produced carbon soot near the reaction zone, but only for high nickel carbonyl concentrations. Convective cooling of the needles during growth was determined to be the primary heat transfer mechanism.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 601
Copyright
Copyright © Materials Research Society 1996

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References

REFERENCES

1 Bäuerle, D., Laser Processing and Diagnostics, Springer Ser. in Chem. Phys., 39, 166–182 (1984).Google Scholar
2 Zong, G.-S., Ph.D. Thesis (1992).Google Scholar
3 Westberg, H., Boman, M., Johansson, S., Schweitz, J.-A., J. Appl. Phys., 73, 7864–7871 (1993).Google Scholar
4 Maxwell, J.L., Proc. Solid Freeform Fabrication Symposium, Austin, TX, 253–271 (1993).Google Scholar
5 Lehmann, O., Stuke, M., Applied Physics A, 53, 343–345 (1991).Google Scholar
6 Wallenberger, F.T., Nordine, P.C., Science, 260, 66–68 (1993).Google Scholar
7 Wallenberger, F. T., Nordine, P. C., Materials Letters, 14, 198–202 (1992).Google Scholar
8 Rytz-Froidevaux, Y., Salathé, R. P., Gilgen, H. H., Physics Letters, 84A, 216–218 (1981)Google Scholar
9 Arnone, C., Rothschild, M., Black, J. G., Ehrlich, D. J., Appl. Phys. Lett., 48, 1018–1020 (1986)Google Scholar
10 Maxwell, J.L., Proc. Solid Freeform Fabrication Symposium, Austin, TX, 143–150 (1995).Google Scholar
11 Bäuerle, D., Chemical Processing with Lasers, Springer-Verlag, NY, 93 (1986).Google Scholar
12 Maxwell, J.L., To be published.Google Scholar
13 Touloukian, Y.S., Thermophysical Properties of Matter, 1, IFI/Plenum, NY (1970).Google Scholar
14 Armstrong, J. V., Enrech, M., Decrouez, C., Lunney, J. G., Coey, J. M. D., IEEE Transactions on Magnetics, 26, 1629–1631 (1990).Google Scholar
15 Garrett, A.P., Thompson, H.W., J. Chem. Soc., 1817 (1934).Google Scholar