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Theoretical and Computational Problems in Modeling Glow Discharges

Published online by Cambridge University Press:  28 February 2011

David B. Graves  and
Klavs F. Jensen
David B. Graves
Affiliation:
Department of Chemical Engineering, University of California, Berkeley, CA 94720
Klavs F. Jensen
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
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Abstract

It is desirable to develop detailed models of glow discharge chemical reactors in order to understand the many complex interactions that govern reactor performance.One important part of an overall model of the plasma reactor is the description of the discharge physical structure including charged particle densities, energies and the self-consistent electric field.The continuum or fluid equation approach to this problem is presented in this paper and potential problems with this approach are discussed.Results from recent simulations of a 13.56 MHz rf discharge are presented.The behavior of the electrons in the quasineutral plasma and their interaction with the self-consistent field are highlighted.It is shown that the rf power dissipation peaks at the plasma-sheath boundary, and the implications of this for the validity of estimates of mean electron density from equivalent rf rcircuit models is discussed.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 68: Symposium C – Plasma Processing , 1986 , 219
Copyright
Copyright © Materials Research Society 1986

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References

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