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Texture of Gold-Palladium Couples

Published online by Cambridge University Press:  10 February 2011

Young S. Chung ,
Keenan Evans  and
William Glaunsinger
Young S. Chung
Affiliation:
Motorola, 5005 E. McDowell Rd., MD=P004, Phoenix, AZ 85008
Keenan Evans
Affiliation:
Motorola, 5005 E. McDowell Rd., MD=P004, Phoenix, AZ 85008
William Glaunsinger
Affiliation:
Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ 85287
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Abstract

The crystal textures of polycrystalline films of gold-palladium couples on an oxidized silicon (100) substrates were investigated via x-ray diffraction (XRD) pole figures. Studies were performed on both as-deposited and thermally annealed films. Scanning electron microscopy (SEM) was used to examine the microstructures of the seed layer thin films as deposited. The {111} texture formation of gold-palladium thin film couples displayed a strong dependence on the nature of the underlying seed layer. Gold films deposited on a palladium seed layer revealed much less degree of {111} texture, than gold films deposited directly on a silicon dioxide surface. In contrast, palladium films deposited on polycrystalline gold films showed a higher degree of {111} texture, compared to palladium films deposited directly on silicon dioxide. The {111} texture of annealed gold-palladium alloy thin films was greater for palladium on gold than for gold on palladium. These results are interpreted in terms of the gold-palladium diffusion mechanism and the interaction of the condensing metals with the oxygens of the SiO2 substrate surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 472: Symposium I – Polycrystalline Thin Films - Structure, Texture, Properties..III , 1997 , 185
Copyright
Copyright © Materials Research Society 1997

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References

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