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Temperature Dependence of Ion Beam Mixing of Ingaas Marker Layers in GaAs

Published online by Cambridge University Press:  21 February 2011

D.D. Forbes ,
J.J. Coleman ,
J.J. Klatt  and
R.R. Averback
D.D. Forbes
Affiliation:
Materials Research Laboratory and Microelectronics Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801
J.J. Coleman
Affiliation:
Materials Research Laboratory and Microelectronics Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801
J.J. Klatt
Affiliation:
Materials Research Laboratory and Microelectronics Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801
R.R. Averback
Affiliation:
Materials Research Laboratory and Microelectronics Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801
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Abstract

Ion beam mixing of In0.20Ga0.80As quantum well marker layers in GaAs following 1 MeV Kr ion irradiation has been measured as a function of irradiation temperature and fluence. Secondary Ion Mass Spectrometry (SIMS) was used to measure the diffusion of the In0.20Ga0.80As layer following irradiation at various temperatures. Rutherford Backscattering (RBS) and channeling methods were used to determine the extent of the amorphization as a result of the implantation. The mixing parameter of the In0.20Ga0.80As in the GaAs matrix increased from σ120 Å5/eV at 77K to σ160Å5/eV in the temperature range of 300K–450K, but decreased somewhat at 573K. This behavior of In0.20Ga0.80As marker layers will be compared to AlAs marker layers which show similar temperature dependence. These results are interpreted on the basis of thermal spikes and crystal structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 311: Symposium O – Phase Transformations in Thin Films–Thermodynamics and Kinetics , 1993 , 227
Copyright
Copyright © Materials Research Society 1993

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References

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