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Techniques and Applications for Non-Planar Lithography
Published online by Cambridge University Press: 11 February 2011
Abstract
Certain classes of three dimensional nanostructures can be fabricated by contact printing patterns onto curved or non-flat surfaces. This paper reviews some of our work that demonstrates this approach by using microcontact printing to form a range of three dimensional structures with feature sizes as small as 1–2 microns and it demonstrates their use in a variety of functional devices. We also describe a nanotransfer printing technique with operational characteristics that are similar to those of microcontact printing but which enables nanometer resolution. High resolution replica molding techniques provide a method for producing copies of some of these printed structures.
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- Research Article
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- Copyright © Materials Research Society 2003
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