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Target Surface Modification and Particulates on YBa2Cu3O7−x Thin Film by Pulsed Laser Deposition

Published online by Cambridge University Press:  26 February 2011

Jeong Dae Suh
Affiliation:
Electronics and Telecommunications Research Institute, P. O. Box 8, Daeduk Science Town, Daejeon, 305–606, KOREA.
Gun Yong Sung
Affiliation:
Electronics and Telecommunications Research Institute, P. O. Box 8, Daeduk Science Town, Daejeon, 305–606, KOREA.
Kwang Yong Kang
Affiliation:
Electronics and Telecommunications Research Institute, P. O. Box 8, Daeduk Science Town, Daejeon, 305–606, KOREA.
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Abstract

The modifications of the laser ablated target surface morphology and the particulates on YBa2Cu3O7−x (YBCO) thin films have been investigated. As the number of laser pulse per site increases, the ablated target surface changes to conical structures. After the texturing of the target surface, the ablated surface morphology changed identically, independent of the initial surface roughness of the polished targets. The YBCO thin films deposited using the stationary target have an almost particulate-free surface. However, in the case of the YBCO films deposited using the rotating target, there is a considerable increase in the density of particulates on the film surface.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

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