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Tantalum and Tantalum Silicide High Temperature Rectifying Contacts on Type MB Natural Diamond
Published online by Cambridge University Press: 25 February 2011
Abstract
Tantalum and tantalum suicide contacts were investigated as high temperature rectifying contacts on type MB natural diamond. Tantalum and silicon were co-sputtered using DC and RF planar magnetrons, respectively. Current-voltage measurements of tantalum suicide subjected to various anneals and of pure tantalum contacts were recorded at 50°C intervals up to 400°C which was the desired operating temperature of the rectifying contact. Tantalum contacts to diamond maintained good rectification up to 300°C whereas amorphous tantalum suicide operated well up to 400°C.
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- Copyright © Materials Research Society 1992
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